The 79th JSAP Autumn Meeting 2018
Session ID : 20p-438-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Selective Cyclic Etching of Lanthanum Oxide Using Formation and Desorption of Organo-Lanthanum Complex
*Yoshihide Yamaguchi, Kazunori Shinoda, Sumiko Fujisaki, Yutaka Kouzuma, Kohei Kawamura, Masaru Izawa
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