JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 79th JSAP Autumn Meeting 2018
Session ID : 20p-438-2
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 79

Location : [in Japanese]

Date : September 18, 2018 - September 21, 2018

Demonstration of Self-limiting Characteristics and Selectivity Control in Annealing Steps for Rapid Thermal-Cyclic ALE
*Kazunori Shinoda, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura, Masaru Izawa, Kenji Ishikawa, Masaru Hori
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Keywords: 20p-438-2, etching, tungsten, titanium nitride
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