The 79th JSAP Autumn Meeting 2018
Session ID : 21a-233-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Effect of SiHCl3 gas concentration on transport phenomena in Minimal Silicon CVD Reactor
Details
Article 1st page
