The 79th JSAP Autumn Meeting 2018
Session ID : 19a-146-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
AlN Molar Fraction Dependence of TMAH Wet Etching on AlGaN
*Shinji Yasue, Kosuke Sato, Yuta Kawase, Junya Ikeda, Yusuke Sakuragi, Sho Iwayama, Motoaki Iwaya, Satoshi Kamiyama, Tetsuya Kamiyama, Isamu Akasaki
Author information
Details
Article 1st page
