JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 79th JSAP Autumn Meeting 2018
Session ID : 20p-234A-7
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 79

Location : [in Japanese]

Date : September 18, 2018 - September 21, 2018

Preparation of SiO2/HfO2 dielectric distributed Bragg reflectors using the reactive helicon-wave-excited-plasma sputtering method
*Kohei Shima, Takumi Kasuya, Kazunobu Kojima, Shigefusa Chichibu
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Keywords: 20p-234A-7, helicon-wave-excited-plasma sputtering, hafnium oxide, Distributed Bragg reflectors
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