JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 66th JSAP Spring Meeting 2019
Session ID : 12a-PB3-11
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Fabrication of Au-Cu Alloy Micro-Cantilever by Electrodeposition
*Kyotaro NittaHaochun TangChun-Yi ChenTso-Fu Mark ChangDaisuke YamaneToshifumi KonishiKatsuyuki MachidaHiroyuki ItoKazuya MasuMasato Sone
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Keywords: 12a-PB3-11, MEMS, gold, alloy
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© 2019 The Japan Society of Applied Physics
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