JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 66th JSAP Spring Meeting 2019
Session ID : 12a-PB3-10
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Micro-Bending Test of Gold Micro-Cantilevers and the effect of thickness
*Kosuke SuzukiKen HashigataKeisuke AsanoChun-Yi ChenTakashi NagoshiTso-Fu Mark ChangDaisuke YamaneToshifumi KonishiKatsuyuki MachidaHiroyuki ItoKazuya MasuMasato Sone
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Keywords: 12a-PB3-10, MEMS, gold
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© 2019 The Japan Society of Applied Physics
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