JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 66th JSAP Spring Meeting 2019
Session ID : 11p-PB3-11
Conference information

Effects of forming gas annealing on electrical properties of Pt/ALD-Al2O3/AlGaN/GaN MIS-HEMTs
*Keita FuruokaToshiharu KuboTakashi Egawa
Author information
Keywords: 11p-PB3-11, GaN, MIS-HEMT, ALD
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Article 1st page
Content from these authors
© 2019 The Japan Society of Applied Physics
Previous article Next article
feedback
Top