The 80th JSAP Autumn Meeting 2019
Session ID : 20p-B11-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O2 mixed gas for high-speed ashing of polyimide film
Details
Article 1st page
