JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 18a-C309-7
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Surface modification of Y2O3 by F+ ion irradiation
*Hojun KangTomoko ItoJunghwan UmHikaru KokuraTaekyun KangSungil ChoHyunjung ParkMichiro IsobeKazuhiro KarahashiSatoshi Hamaguchi
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Keywords: 18a-C309-7, Y2O3, F ion, Etching
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© 2019 The Japan Society of Applied Physics
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