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*Hojun Kang
Center for Atomic and Molecular Technologies, Graduate School of Enginerring, Osaka Univ
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Tomoko Ito
Center for Atomic and Molecular Technologies, Graduate School of Enginerring, Osaka Univ
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Junghwan Um
Memory Etch Technology Team, Samsung Electronics
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Hikaru Kokura
Memory Etch Technology Team, Samsung Electronics
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Taekyun Kang
Memory Etch Technology Team, Samsung Electronics
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Sungil Cho
Memory Etch Technology Team, Samsung Electronics
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Hyunjung Park
Memory Etch Technology Team, Samsung Electronics
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Michiro Isobe
Center for Atomic and Molecular Technologies, Graduate School of Enginerring, Osaka Univ
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Kazuhiro Karahashi
Center for Atomic and Molecular Technologies, Graduate School of Enginerring, Osaka Univ
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Satoshi Hamaguchi
Center for Atomic and Molecular Technologies, Graduate School of Enginerring, Osaka Univ