The 80th JSAP Autumn Meeting 2019
Session ID : 18a-C309-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Identification of Gas-chemistry-dependent “Effective” Polarity of Plasma-damaged Layer in Si Substrates
Details
Article 1st page
