JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 80th JSAP Autumn Meeting 2019
Session ID : 18a-C309-8
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Identification of Gas-chemistry-dependent “Effective” Polarity of Plasma-damaged Layer in Si Substrates
*Takashi HamanoKeiichiro UrabeKoji Eriguchi
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© 2019 The Japan Society of Applied Physics
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