The 80th JSAP Autumn Meeting 2019
Session ID : 18a-C309-8
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Autumn Meeting
Number :
80
Location :
[in Japanese]
Date :
September 18, 2019 - September 21, 2019
Identification of Gas-chemistry-dependent “Effective” Polarity of Plasma-damaged Layer in Si Substrates