The 80th JSAP Autumn Meeting 2019
Session ID : 18p-C309-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Pressure dependence of polycrystalline diamond film deposition using time-series exposure of modulated and non-modulated Ar/CH4/H2 induction thermal plasmas.
*Kazufumi Hata, Kano Naoki, Nakano Yusuke, Tanaka Yasunori, Uesugi Yoshihiko, Ishijima Tatsuo
Author information
Keywords:
18p-C309-5,
Modulated induction thermal plasma,
Non-modulated induction thermal plasma,
Polycrystalline diamond
Details
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