The 80th JSAP Autumn Meeting 2019
Session ID : 18p-PB2-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Orientation dependence of the penetration barrier of H2O molecule into SiO2 and Si3N4 films
Details
Article 1st page
