The 80th JSAP Autumn Meeting 2019
Session ID : 20p-E310-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Influence of NH3 partial pressure on homoepitaxial growth of AlN by HVPE
*Nao Takekawa, Daichi Saito, Yudai Shimizu, Ken Goto, Toru Nagashima, Reo Yamamoto, Yoshinao Kumagai
Author information
Details
Article 1st page
