The 80th JSAP Autumn Meeting 2019
Session ID : 20a-B31-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Crystallinity and electrical properties of Ar+O2+H2 sputtered In–Ga–O thin films
Details
Article 1st page
