The 80th JSAP Autumn Meeting 2019
Session ID : 18a-E205-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 80
Location : [in Japanese]
Date : September 18, 2019 - September 21, 2019
Beam quality control of DUV laser beam using random phase plate
*Yohei Tanaka, Chen Qu, Yuki Tamaru, Hironori Igarashi, Atsushi Fuchimukai, Taisuke Miura, Junichi Fujimoto, Hakaru Mizoguchi
Author information
Details
Article 1st page
