The 67th JSAP Spring Meeting 2020
Session ID : 12p-A202-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Comparison of non-volatile memory characteristics for Hf-based MONOS diode with HfO2 and HfON tunneling layer
Details
Article 1st page
