The 67th JSAP Spring Meeting 2020
Session ID : 14p-A303-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Endurance property of low-temperature (300 °C)-fabricated ferroelectric HfxZr1−xO2 thin films using plasma-enhanced atomic layer deposition
*Takashi Onaya, Toshihide Nabatame, Yongchan Jung, Hernandez-Arriaga Heber, Jaidah Mohan, Harrison S. Kim, Ava Khosravi, Naomi Sawamoto, Takahiro Nagata, Robert M. Wallace, Jiyoung Kim, Atsushi Ogura
Author information
Keywords:
14p-A303-9,
ferroelectric HfxZr1-xO2 thin film,
plasma-enhanced atomic layer deposition,
endurance property
Details
Article 1st page
