The 67th JSAP Spring Meeting 2020
Session ID : 15a-A305-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
The influence of low temperature oxidation process on electrical stress tolerance of SiO2
Keywords:
15a-A305-3,
Low tempetature oxidation process,
Time-Dependent Dielectric Breakdown,
SiO2 films
Details
Article 1st page
