The 67th JSAP Spring Meeting 2020
Session ID : 15a-A305-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
XPS analysis of a low-temperature ALD film by high purity ozone and ethylene with TMA
*Takayuki Hagiwara, Ayaka Abe, Naoto Kameda, Toshinori Miura, Yoshiki Morikawa, Mitsuru Kekura, Ken Nakamura, Hidehiko Nonaka
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