The 67th JSAP Spring Meeting 2020
Session ID : 15a-A305-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Low Temperature Neutral Beam Enhanced Atomic Layer Deposition of Silicon Nitride
*HuaHsuan Chen, Beibei Ge, Daisuke Ohori, Tomohiro Kubota, Dai Ishikawa, Seiji Samukawa
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