The 67th JSAP Spring Meeting 2020
Session ID : 15a-A305-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Characteristics of slow traps in Al2O3/GeOx/n-Ge MOS interfaces by plasma oxidation
Details
Article 1st page
