JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 67th JSAP Spring Meeting 2020
Session ID : 14p-B401-14
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Influence of PDA ambient gas on characteristics of n-β-Ga2O3/Al2O3/Pt MOS capacitors
*Masafumi HiroseToshihide NabatameErika MaedaAkihiko OhiNaoki IkedaYoshihiro IrokowaYasuo KoideHajime Kiyono
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Keywords: 14p-B401-14, Ga2O3, Al2O3, PDA
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© 2020 The Japan Society of Applied Physics
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