The 81st JSAP Autumn Meeting 2020
Session ID : 10a-Z03-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 81
Location : [in Japanese]
Date : September 08, 2020 - September 11, 2020
Numerical Analysis of Input-Power Dependence of DLC Film Deposition Process by Low-Pressure and Radio Frequency Ar/CH4 plasma-enhanced CVD
Details
Article 1st page
