JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 81st JSAP Autumn Meeting 2020
Session ID : 10p-Z10-8
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Control of As clusters in Si by co-doping of As and B
*Kazuo TsutsuiTaihei MatsuhashiTakuya HoshiiKuniyuki KakushimaHitoshi WakabayashiTsutomu NagayamaTakahiro HiguchiShinichi KatoHideaki TanimuraTakayuki MuroTomohiro MatsushitaYoshitada Morikawa
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© 2020 The Japan Society of Applied Physics
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