The 81st JSAP Autumn Meeting 2020
Session ID : 10p-Z10-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 81
Location : [in Japanese]
Date : September 08, 2020 - September 11, 2020
Influence of H2 Annealing Process for Si-IGBT
*Longxiang Men, Ryo Yokogawa, Yoichiro Numasawa, Kazuo Tsutsui, Kuniyuki Kakushima, Atsushi Ogura
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Article 1st page
