The 68th JSAP Spring Meeting 2021
Session ID : 18p-Z17-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Measurement of Influence of Input Power on Fundamental Properties of Tetramethylsilane Plasmas for Deposition of Si-containing DLC Films
*Yoshiaki Watanabe, Shun Suzuki, Koichi Ishii, Akinori Oda, Takayuki Ohta, Hiroyuki Kousaka
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