The 68th JSAP Spring Meeting 2021
Session ID : 18p-Z17-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O2 Plasma
Keywords:
18p-Z17-11,
atmospheric pressure plasma
Details
Article 1st page
