The 68th JSAP Spring Meeting 2021
Session ID : 19a-P02-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Low-temperature Formation of High-Mobility IGZO Thin Film Transistors using Reactive Plasma Processes (III)
*Kosuke Takenaka, Hiroyuki Hirayama, Tomoki Fujimura, Yuji Hayashi, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara
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