The 68th JSAP Spring Meeting 2021
Session ID : 19a-P02-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Development of Pulse-Arc-Plasma-Jet Source with Coaxial Gas Line for DLC High-Rate Deposition
*Toru Harigai, Ryoya Tominaga, Hikaru Ohhra, Hirofumi Takikawa, Kohtaku Suzuki, Shinsuke Kunitsugu, Hidenobu Gonda
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