The 68th JSAP Spring Meeting 2021
Session ID : 19a-P04-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Low temperature synthesis and physicochemical characterization of Al2O3 thin films formed by oxygen plasma irradiation on Al(CH3)3 condensed layer.
Details
Article 1st page
