The 68th JSAP Spring Meeting 2021
Session ID : 19a-P04-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Development of a wafer surface charge suppression method by low frequency voltage for atomic level profile control in plasma etching
Details
Article 1st page
