The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z24-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Deposition of AlN thin film using minimal RF-sputtering machine
*Masaya Hotta, Hiroshi Nishizato, Haruki Toonoe, Ikunari Shiba, Takuya Maeda, Yuki Odo, Satoshi Fujii
Author information
Details
Article 1st page
