The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z24-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Investigation of Ashing Rate and Uniformity Improvement using Microwave-Excited Water Vapor Plasma
*Takeshi Aizawa, Tasuku Sakurai, Tatsuo Ishijima, Yasunori Tanaka, Yusuke Nakano, Shiro Hara
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