The 68th JSAP Spring Meeting 2021
Session ID : 17p-Z26-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Reaction Kinetic Analysis of Desorption Behavior of Hydrogen in Projection Range of Multi-Element Molecular Ion Implanted Epitaxial Wafer for Advanced CMOS image sensors
*Ryosuke Okuyama, Ayumi Masada, Satoshi Shigematsu, Ryo Hirose, Takeshi Kadono, Yoshihiro Koga, Hidehiko Okuda, Kazunari Kurita
Author information
Details
Article 1st page
