The 68th JSAP Spring Meeting 2021
Session ID : 17p-Z26-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Plasma-induced defects and band structure in c-Si surface passivation process
Details
Article 1st page
