The 68th JSAP Spring Meeting 2021
Session ID : 16a-Z16-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Investigation of Post-Deposition Annealing Conditions for Improving Interface Property of SiO2/GaN MOS Devices
*Hidetoshi Mizobata, Yuhei Wada, Mikito Nozaki, Takuji Hosoi, Takayoshi Shimura, Heiji Watanabe
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