JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 16a-Z16-7
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Crystal face dependence of channel characteristics of GaN UMOS subjected to TMAH treatment
*Hirohisa HiraiYoshinao MiuraAkira NakajimaShinsuke HaradaHiroshi Yamaguchi
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Keywords: 16a-Z16-7, GaN, MOS, trench
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© 2021 The Japan Society of Applied Physics
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