The 68th JSAP Spring Meeting 2021
Session ID : 16a-Z16-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Effect of Nitrogen Plasma Treatment on Characteristics of GaN Trench MOSFETs
*KyungPil NAM, Takashi Ishida, Maciej Matys, Tsutomu Uesugi, Tetsu Kachi, Jun Suda
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