The 68th JSAP Spring Meeting 2021
Session ID : 16p-Z27-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Design and Fabrication of Transverse Quasi-Phase-Matched Polarity Inverted Double-Layer AlN Waveguide for 230-nm DUV Generation
*Hiroto Honda, Takumi Nagata, Shuhei Ichikawa, Yasufumi Fujiwara, Kanako Shojiki, Hideto Miyake, Masahiro Uemukai, Tomoyuki Tanikawa, Ryuji Katayama
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