The 68th JSAP Spring Meeting 2021
Session ID : 19p-Z27-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
MOVPE Growth of AlGaN Channel HEMTs on Annealed Sputtered AlN Templates
*Ryuichi Mori, Kenjiro Uesugi, Tatsuya Shirato, Shigeyuki Kuboya, Kanako Shojiki, Hideto Miyake
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