JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 19p-Z27-6
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Origin of AlGaN Anomalous Growth on High-Temperature Annealed AlN Template
*Kenjiro UesugiYuta TezenShiyu XiaoKenji NorimatsuMina OkamuraTsutomu ArakiHideto Miyake
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Keywords: 19p-Z27-6, AlN, AlGaN, anneal
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© 2021 The Japan Society of Applied Physics
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