The 68th JSAP Spring Meeting 2021
Session ID : 17a-Z28-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Behavior of carrot defects on SiC (000-1) face homoepitaxial layer
*Taro Enokizono, Takaya Miyase, Hiroki Nishihara, Tetsuro Kondo, Hironori Itoh, Tsutomu Hori, Masaki Furumai
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