The 68th JSAP Spring Meeting 2021
Session ID : 17a-Z28-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
SiC Epitaxial reactor cleaning by detaching SiC film
Takumi Mamyouda, Masaya Hayashi, *Hitoshi Habuka, Akio Ishiguro, Shigeaki Ishii, Yoshiaki Daigo, Hideki Ito, Ichiro Mizushima, Yoshinao Takahashi
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