The 68th JSAP Spring Meeting 2021
Session ID : 17a-Z28-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Evaluation of the effect of the ion implantation process on carrier lifetimes in 4H-SiC SJ-UMOSFET
Details
Article 1st page
