The 68th JSAP Spring Meeting 2021
Session ID : 17a-Z28-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
To construct 4H-SiC p/n columns with relatively uniform doping profiles
*Shiyang Ji, Katzutoshi Kojima, Mitsuru Sometani, Shinsuke Harada, Yasunori Tanaka, Hiroshi Yamaguchi
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