The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z33-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Post-deposition annealing effect on ALD-Al2O3 formed on (001) β-Ga2O3
*Atsushi Hiraiwa, Kiyotaka Horikawa, Hiroshi Kawarada, Motohisa Kado, Katsunori Danno
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