The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z33-8
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
68
Location :
[in Japanese]
Date :
March 16, 2021 - March 19, 2021
Stacking Faults Generated from Micro Particles-Origin of Leakage Current in HVPE (001) beta-Gallium Oxide Epilayers Determined by High-Sensitive Emission Microscope