The 82nd JSAP Autumn Meeting 2021
Session ID : 13p-S301-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Structural analysis of DLC films using low-energy positron and soft X-ray beams
*Kazuhiro Kanda, Hiroki Akasaka, Fuminobu Hori, Atsushi Yabuuchi, Atsushi Kinomura
Author information
Keywords:
13p-S301-9,
amorphous carbon film,
positron annihilation spectroscopy,
near edge X-ray absorption fine structure
Details
Article 1st page
