The 82nd JSAP Autumn Meeting 2021
Session ID : 13p-S301-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Fabrication and structural analysis of high-nitrogen containing a-CNx:H thin films using radio-frequency plasma CVD of the acetylene-N2-Ar gas mixture
Details
Article 1st page
